Electronics are part of modern daily life and imagining life without them is no longer possible. Computers, smartphones, automobiles, home control devices, medical equipment and other highly integrated circuits are all based on semiconductor technology.
Advantages
The market is driven by modern communication tools such as smartphones, tablets, TV flat panel displays or the Internet of Things. Whether it is an ion implanter, etching or PECVD equipment - LeyNow will find you a high-quality and high-reliability vacuum solution for optimal performance.
Semiconductor processing
The market is driven by modern communication tools such as smartphones, tablets, TV flat panel displays or the Internet of Things. Whether it is an ion implanter, etching or PECVD equipment - LeyNow will find you a high-quality and high-reliability vacuum solution for optimal performance. We continue to innovate leading technology solutions that improve process uptime, throughput, throughput and safety certification, while striving to balance this by mitigating environmentally harmful emissions, extending product life and reducing ongoing service costs Often conflicting requirements for lower cost of ownership.
Lithography
Lithography, the patterning of wafers, is a critical step in the semiconductor manufacturing process. While traditional and even immersion lithography generally do not require a vacuum environment, extreme ultraviolet (EUV) lithography and electron beam lithography do require vacuum pumps. LEYNOW allows you to effectively handle both applications.
chemical vapor precipitation
Chemical vapor deposition (CVD) systems come in a variety of configurations for depositing many types of thin films. The process also operates at different pressure and flow regimes, many of which use fluorine-containing dry cleaning processes. All of these variables mean you need to consult with one of our applications engineers to select the appropriate pump and gas reduction system to maximize service intervals for our products and increase uptime for your process.
etching
Because many semiconductors have very fine feature sizes, etching processes are becoming increasingly complex. Additionally, the expansion of MEMS devices and 3D structures increasingly uses silicon etching processes for structures with high aspect ratios. Traditionally, etching processes can be grouped into silicon, oxide, and metal categories. With more hard mattes and high-k materials being used in today's devices, the lines between these categories have become very blurred. Certain materials used in today's equipment can resist evaporation during the etching process, resulting in deposition within the vacuum components. Today's manufacturing processes have indeed become more challenging than they were a few years ago. We closely monitor industry and process changes and keep pace with them through product innovation to achieve best-in-class performance.
Ion implantation
Ion implantation tools still play an important role in the front-end process. The vacuum challenges associated with ion implantation have not become easier over time, and we recognize the challenges faced when operating vacuum pumps in noisy electronic environments. We never settle for absolute minimum performance testing in compliance with established electromagnetic immunity testing standards. We know that pumps used on injection tools will require higher immunity and special design features to ensure that the high voltage section of the injection tool does not interfere with pump reliability.
Article source:https://www.leynow.com.cn/applications/254.html
Disclaimer: If the article needs to be reprinted, please indicate the source. Some articles and pictures on this site come from online editors. If there are any copyright issues, please communicate and resolve them in time.
Leynow Company is a high-tech enterprise that develops, sells vacuum pumps and provides solutions in the vacuum field. It provides users with the most reliable, safe and easy-to-use vacuum equipment products and high-quality professional services to help global customers and partners achieve success. The company's main products include: rotary vane vacuum pumps, screw vacuum pumps, Roots vacuum pumps, piston vacuum pumps, etc.
Leynow public account
Troubleshooting solutions
In modern families, the popularity of household medical equipment is gradually increasing, among which household ventilators and oxygen concentrators are two co......
旋片真空泵维修故障原因分析及解决方案:保持旋片真空泵处于最佳状态对其系统组件进行适当维护以尽量减少出现异常至关重要。然而,当它发生时,有着高超的旋片真空泵故障排除专业技能至关重要。旋片真空泵没有真空原因:泵不旋转泵翻转、泵干转、真空计有瑕疵、隔离阀打开或关闭不合理解决方案:查验电动机/启动器、翻转电动机极性、持续加注密......
在实际操作中,我们会发现旋片真空泵常见的故障类型是有很多种的,可以把故障分为运转故障和性能故障。旋片真空泵维修技巧其实就是一旦真空泵出现故障现象,我们需要分析其故障原因,根据这个问题、原因,从而对其进行合适的真空泵维修,这个是非常关键的,需要引起大家的重视,如果不是因为这个原因造成的故障,你却使用这个故障原因对应的维修......
我们在真空泵维修的时候要需要弄清楚真空泵油路的来龙去脉,以及油位的调节系统,油箱内的油通过端盖油孔通往泵浦,侧面端盖和腔体面之间有个调节针阀。如果油路调节不当时,就会影响真空泵度的升降。要是泵浦之间的装配配件间隙控制合适,供油量过大就会使真空度下降,要是轴和套间隙大一点,可以通过加大供油量来提升真空度,当双级泵的一级间......
泵是一种应用非常广泛、品种繁多的通用机械,正确选择泵的类型和型号是十分重要的。这直接关系到泵能否达到系统设计要求、泵的可靠性和使用寿命、泵的购置成本和寿命周期内总成本等。现实中,由于选型不合理,许多泵处于不正常状态运行,造成能源浪费,维修成本增加,甚...
真空烤箱真空泵的注意事项:真空泵严禁抽除易燃,易爆及有毒的气体;真空泵不得抽除对金属有腐蚀性及能与泵油起化学反应的气体;真空泵不得抽除含有颗粒尘埃及大量水蒸气的的气体;被抽气体的温度不得超过80℃,使用环境温度为了-5℃-60℃;真空泵不得作压缩泵及输送泵使用;真空泵严禁无油运转;泵运行时,严禁堵塞排气口;①真空泵使用......
Please fill in the required information carefully and we will contact you within 24 hours