小型实验室真空泵的防油污染措施该怎么做?

  • Article source:Industry News
  • Website editor:莱诺真空泵
  • Reading volume:
  • Publication time:2022-06-29 10:46:14

小型实验室真空泵的工作压强应该满足真空设备的极限真空及工作压强要求。如:真空镀膜要求110-5mmHg的真空度,选用的真空泵的真空度至少要510-6mmHg。通常选择泵的真空度要高于真空设备真空度半个到一个数量级。

正确地选择实验室用真空泵的工作点。每种泵都有一定的工作压强范围,如:扩散泵为10-3~10-7mmHg,在这样宽压强范围内,泵的抽速随压强而变化,其稳定的工作压强范围为510-4~510-6mmHg。因而,泵的工作点应该选在这个范围之内,而不能让它在10-8mmHg下长期工作。又如钛升华泵可以在10-2mmHg下工作,但其工作压强应小于110-5mmHg为好。

2.png

小型实验室真空泵在其工作压强下,应能排走真空设备工艺过程中产生的全部气体量。正确地组合真空泵。由于真空泵有选择性抽气,因而,有时选用一种泵不能满足抽气要求,需要几种泵组合起来,互相补充才能满足抽气要求。三极型溅射离子泵,(或二极型非对称阴极溅射离子泵)对氩有一定的抽速,两者组合起来,便会使真空装置得到较好的真空度。另外,有的真空泵不能在大气压下工作,需要预真空;有的真空泵出口压强低于大气压,需要前级泵,故都需要把泵组合起来使用。

真空设备对油污染的要求。若设备严格要求无油时,应该选各种无油泵,如:水环泵、分子筛吸附泵、溅射离子泵、低温泵等。如果要求不严格,可以选择有油泵,加上一些防油污染措施,如加冷阱、障板、挡油阱等,也能达到清洁真空要求。


Article source:https://www.leynow.com.cn/news/606.html

Disclaimer: If the article needs to be reprinted, please indicate the source. Some articles and pictures on this site come from online editors. If there are any copyright issues, please communicate and resolve them in time.

LeyNow Company is a high-tech enterprise that develops, sells vacuum pumps and provides solutions in the vacuum field. It provides users with the most reliable, safe and easy-to-use vacuum equipment products and high-quality professional services to help global customers and partners achieve success. The company's main products include: rotary vane vacuum pumps, screw vacuum pumps, Roots vacuum pumps, piston vacuum pumps, etc.

Up to date Industry News

Leynow public account

Troubleshooting solutions

Related information Mome
Hot products Mome
Do you have any questions about vacuum pump systems and solutions

Please fill in the required information carefully and we will contact you within 24 hours