干式螺杆真空泵的原理

  • Article source:Industry News
  • Website editor:莱诺真空泵
  • Reading volume:
  • Publication time:2019-09-23 08:43:28

干式螺杆真空泵原理是利用一对螺杆,在螺杆真空泵泵腔内作同步反方向的高速运转,两个转子和泵体以及侧盖一起构成了若干个室进而达成吸排气作用的抽气机械设备。这些气室有规律地从真空泵的进气口侧往排气口侧“移动”,这样气体就被以低速旋流的方式传送出去。真空泵的持续运转不会改变气体的流向,这样可以在一定限度内将气体可能夹带的细小颗粒以及蒸汽抽送出去。
在干式螺杆真空泵工作时,两螺杆相互直接没有摩擦力的产生,泵腔内无需润滑油,在运行过程中机器平稳,产生的声音小。与等距螺杆真空泵相比,变螺距结构的真空泵极限真空度更高,有着良好的间隙设计和连续的压缩方式,单泵就可达到0.0075torr的极限真空。能耗更低,变螺距螺杆真空泵的节能型设计理念,可降低30%的电能消耗,是油封式真空泵良好的替代产品。在半导体行业里面,油封式的真空泵可以由干式螺杆真空泵替代,大大提升工作环境的质量,进而提高所生产出产品的质量与性能。


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